Volume 11 (2024) | Issue 5
Volume 11 (2024) | Issue 5
Volume 11 (2024) | Issue 5
Volume 11 (2024) | Issue 5
Volume 11 (2024) | Issue 4
In this paper we have designed, simulated and analyzed various shaped MEMS based cantilevers like rectangular, T-shaped, Π-shaped and cone shaped cantilevers. The simulation of these MEMS based cantilevers are executed in COMSOL Multiphysics Tool. From the analysis, the T-shaped cantilevers with width W=300µm, length L=50µm and thickness t=20µm with paddle width W=20µm and length L=300µm produces maximum displacement of 7.2515×106µm.