Keywords : micromachined accelerometer
Comparative Analysis Of MEMS Piezoelectric Energy Harvesters Capacitive Pressure Sensor Based On The Mechanical Vibrations Using Different Materials
European Journal of Molecular & Clinical Medicine,
2020, Volume 7, Issue 3, Pages 4692-4698
MEMS plays a vital role in manufacturing several electronic devices.It has a wide application in electronics manufacturing field.The fabrication of MEMS is very popular because of its miniature size,capacity power,sensitivity,etc. MEMS fabrication is possible even at high resonant frequency devices which can be operated at regular frequencies and greater bandwidths.Simulation is done using COMSOL multiphysics software.A surface capacitive pressure sensor has been simulated using different materials.The capacitance is analysed and the graphs are plotted.