DESIGN OF VARIOUS SHAPED MEMS BASED CANTILEVERS EXECUTED IN COMSOL MULTIPHYSICS
European Journal of Molecular & Clinical Medicine,
2020, Volume 7, Issue 10, Pages 1972-1979
AbstractIn this paper we have designed, simulated and analyzed various shaped MEMS based cantilevers like rectangular, T-shaped, Π-shaped and cone shaped cantilevers. The simulation of these MEMS based cantilevers are executed in COMSOL Multiphysics Tool. From the analysis, the T-shaped cantilevers with width W=300µm, length L=50µm and thickness t=20µm with paddle width W=20µm and length L=300µm produces maximum displacement of 7.2515×106µm.
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